✦ LIBER ✦
Infrared spectroscopic study of thin films of poly(methylsilane), its oxidation, and its transformation into poly(carbosilane) on the surfaces of silicon single-crystal wafers
✍ Scribed by Scarlete, Mihai; Brienne, Stephane; Butler, Ian S.; Harrod, John F.
- Book ID
- 126040736
- Publisher
- American Chemical Society
- Year
- 1994
- Tongue
- English
- Weight
- 657 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0897-4756
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