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Infrared optical properties of evaporated alumina films

โœ Scribed by Eriksson, T. S. ;Hjortsberg, A. ;Niklasson, G. A. ;Granqvist, C. G.


Book ID
115329199
Publisher
The Optical Society
Year
1981
Tongue
English
Weight
642 KB
Volume
20
Category
Article
ISSN
1559-128X

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## Abstract Erbium fluoride (ErF~3~) films were deposited on germanium substrate with different substrate temperatures. The films deposited at low substrate temperatures show amorphous structure, while those deposited at high substrate temperatures show polycrystalline structure with (002) preferre