✦ LIBER ✦
Infrared-light interferometry and a phase-stepping algorithm for measuring the three-dimensional topography of components covered with GaAs or Si
✍ Scribed by Xiujian Chou; Kangkang Niu; Yi Liu; Chenyang Xue; Jun Liu; Wendong Zhang
- Book ID
- 113054320
- Publisher
- Optical Society of Japan
- Year
- 2012
- Tongue
- English
- Weight
- 805 KB
- Volume
- 19
- Category
- Article
- ISSN
- 1340-6000
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