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Infrared lensless holographic microscope with a vidicon camera for inspection of metallic evaporations on silicon wafers

✍ Scribed by L. Repetto; R. Chittofrati; E. Piano; C. Pontiggia


Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
203 KB
Volume
251
Category
Article
ISSN
0030-4018

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