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Infrared attenuated-total-reflection spectroscopy of microcrystalline silicon growth

✍ Scribed by Yoshirou Okazaki; Seiichi Miyazaki; Masataka Hirose

Book ID: 117150259
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 239 KB
Volume: 266-269
Category: Article
ISSN: 0022-3093
DOI: 10.1016/s0022-3093(99)00726-7

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