✦ LIBER ✦
Influence of Wafer Preclean before Selective Tungsten CVD on Surface Properties of Interconnect and Intermetal Dielectric Materials
✍ Scribed by Schulz, S. E. ;Hintze, B. ;Grünewald, W. ;Hofmann, A.
- Book ID
- 105384332
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 627 KB
- Volume
- 145
- Category
- Article
- ISSN
- 0031-8965
No coin nor oath required. For personal study only.