## Arc ion plating Magnetron sputtering Substrate bias voltage Cr-Mo-Si-N coatings were prepared on Si wafer by a hybrid coating system combining arc ion plating and magnetron sputtering at the substrate bias voltage ranging from 0 to -400 V. The results showed that the deposition rate, film micro
Influence of vibrational entropy on structural stability of Nb–Si and Mo–Si systems at elevated temperatures
✍ Scribed by Yue Chen; T. Hammerschmidt; D.G. Pettifor; Jia-Xiang Shang; Yue Zhang
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 764 KB
- Volume
- 57
- Category
- Article
- ISSN
- 1359-6454
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✦ Synopsis
The heats of formation of stable and metastable phases of the Nb-Si and Mo-Si systems were studied using density functional theory (DFT). The high-temperature behavior of the competing phases was studied by performing additional phonon calculations. Our theoretical results rationalize the major differences observed in the behavior of the Nb-Si and Mo-Si systems: Nb 3 Si is only stable at temperatures above 2043 K, whereas Mo 3 Si is always stable; Nb 5 Si 3 and MoSi 2 undergo phase changes at elevated temperatures, in contrast to Mo 5 Si 3 and NbSi 2 . These differences are qualitatively explained by including the vibrational entropy to the free energies within the harmonic approximation. In particular, the softer shear moduli of the Nb 5 Si 3 and MoSi 2 b phases cause their stabilities over the a phases at elevated temperature.
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