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Influence of UV irradiation and RTA process on optical properties of Si implanted SiO2

✍ Scribed by T.S. Iwayama; T. Hama; D.E. Hole

Book ID: 103864016
Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 411 KB
Volume: 268
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2010.05.089

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