✦ LIBER ✦
Influence of thickness on nanomechanical behavior of Black Diamond™ low dielectric thin films for interconnect and packaging applications
✍ Scribed by V. N. Sekhar; T. C. Chai; S. Balakumar; Lu Shen; S. K. Sinha; A. A. O. Tay; Seung Wook Yoon
- Publisher
- Springer US
- Year
- 2008
- Tongue
- English
- Weight
- 815 KB
- Volume
- 20
- Category
- Article
- ISSN
- 0957-4522
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