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Influence of thermal cycling on structural, optical and electrical properties of vanadium oxide thin films

✍ Scribed by Xiaochun Wu; Fachun Lai; Limei Lin; Yongzeng Li; Lianghui Lin; Yan Qu; Zhigao Huang

Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
791 KB
Volume
255
Category
Article
ISSN
0169-4332

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## Abstract Transparent Zinc Oxide (ZnO) thin films have been grown on Si (100) and Sapphire (0001) substrates by RF magnetron sputtering for different growth time intervals (10, 30 and 60 min) to study the substrate and thickness effects. All the films have been grown at a substrate temperature of