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Influence of the spacer dielectric processes on PMOS junction properties

✍ Scribed by Pierre Morin; Francois Wacquant; Marc Juhel; Cyrille Laviron; D. Lenoble

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
284 KB
Volume
124-125
Category
Article
ISSN
0921-5107

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