Influence of the source gas ratio on the hydrogen and deuterium content of a-C:H and a-C:D films: Plasma-enhanced CVD with CH4/H2, CH4/D2, CD4/H2 and CD4/D2

✍ Scribed by Ozeki, K.; Sekiba, D.; Suzuki, T.; Kanda, K.; Niibe, M.; Hirakuri, K.K.; Masuzawa, T.

• Book ID: 118415811
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 555 KB
• Volume: 265
• Category: Article
• ISSN: 0169-4332
• DOI: 10.1016/j.apsusc.2012.11.100