Influence of the pumping speed on the hysteresis effect in the reactive sputtering of thin films: S Kadlec et al, Vacuum, 37, 1987, 729–738

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 156 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90331-x