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Influence of the Pt electrode on the properties of sol-gel PZT-films

โœ Scribed by Geert J. Willems; Dirk J. Wouters; Herman E. Maes

Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
298 KB
Volume
29
Category
Article
ISSN
0167-9317

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Stoichiometric Pb(Zr x Ti (1-x) O 3 ) (PZT) thin films deposited on Si(1 0 0) substrates have been prepared by the sol-gel technique. Two sets of films of amorphous and polycrystalline, containing 20%, 30%, 50%, and 60% Ti, were prepared and investigated. The microstructures and surface morphologies