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Influence of the free gas volume on the chemical vapour deposition of alumina : J. Peng et al, (Technical University, Vienna, Austria), Int. J. Refractory Metals & Hard Materials, Vol 10, No 4, 1991, 203–210. (In German)


Book ID
116032101
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
260 KB
Volume
47
Category
Article
ISSN
0026-0657

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