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Influence of the film thickness on the structure, optical and electrical properties of ITO coatings deposited by sputtering at room temperature on glass and plastic substrates

✍ Scribed by Guillén, C; Herrero, J


Book ID
121440606
Publisher
Institute of Physics
Year
2008
Tongue
English
Weight
553 KB
Volume
23
Category
Article
ISSN
0268-1242

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## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 μm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic