Influence of the experimental procedure in the specific surface measurement by chemical dissolution of n+nanoporous silicon

✍ Scribed by Descamps, Y. ;Dufour-Gergam, E. ;Halimaoui, A.

• Book ID: 105363152
• Publisher: John Wiley and Sons
• Year: 2005
• Tongue: English
• Weight: 87 KB
• Volume: 202
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/pssa.200461178

✦ Synopsis

Abstract

In this paper, we used the chemical dissolution of porous silicon (PS) to determine the specific surface area of PS obtained from n^+^ substrate. Two initial porosity values (62 and 39% with 1 µm and 0.5 µm thickness respectively) and two dissolution etchants were used. It is shown that the dissolution experimental procedure influences the extracted specific surface value. Under good dissolution conditions, we calculed 90 m^2^/cm^3^ and 130 m^2^/cm^3^ surface area value respectively. (© 2005 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)