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Influence of the elemental composition and crystal structure on the vacuum properties of Ti–Zr–V nonevaporable getter films

✍ Scribed by Benvenuti, C.; Chiggiato, P.; Mongelluzzo, A.; Prodromides, A.; Ruzinov, V.; Scheuerlein, C.; Taborelli, M.; Lévy, F.


Book ID
126890900
Publisher
AVS (American Vacuum Society)
Year
2001
Tongue
English
Weight
573 KB
Volume
19
Category
Article
ISSN
0734-2101

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