✦ LIBER ✦
Influence of the anti reflective coating on the electromigration resistance of 0.5 μm technology metal-2 line structures
✍ Scribed by R. Stevens; A. Witvrouw; Ph.J. Roussel; K. Maex; H. Meynen; A. Cuthbertson
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 548 KB
- Volume
- 91
- Category
- Article
- ISSN
- 0169-4332
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