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Influence of the amorphous/crystalline phase of Zr[sub 1âx]Al[sub x]O[sub 2] high-k layers on the capacitance performance of metal insulator metal stacks

✍ Scribed by Paskaleva, Albena; Lemberger, Martin; Bauer, Anton J.; Weinreich, Wenke; Heitmann, Johannes; Erben, Elke; SchroÌder, Uwe; Oberbeck, Lars

Book ID: 120417499
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 714 KB
Volume: 106
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3204666

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Influence of the amorphous/crystalline phase of Zr[sub 1âx]Al[sub x]O[sub 2] high-k layers on the capacitance performance of metal insulator metal stacks

Influence of the amorphous/crystalline phase of Zr[sub 1âx]Al[sub x]O[sub 2] high-k layers on the capacitance performance of metal insulator metal stacks