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Influence of test capacitor features on piezoelectric and dielectric measurement of ferroelectric films

✍ Scribed by Zhihong Wang, ; Gih Keong Lau, ; Weiguang Zhu, ; Chen Chao,


Book ID
120291757
Publisher
IEEE
Year
2006
Tongue
English
Weight
446 KB
Volume
53
Category
Article
ISSN
0885-3010

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## Abstract A procedure to include conductor loss in interdigital capacitor based dielectric constant measurements is proposed. The effect of conductor loss and contact resistance can be regarded as a series resistor connected to the interdigital capacitor. If the thickness of the conductor film is