Influence of target-substrate distance a
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F. Goerke; A. Thorns
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Article
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1995
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Elsevier Science
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English
⚖ 658 KB
A pulsed KrF excimer laser is used to deposit YBa2Cu30 7 films on MgO (100). We report on the influence of target-substrate distance, oxygen pressure and substrate temperature in the range of 30 to 100 mm, 0.03 to 0.4 mbar and 732 to 800°C, respectively. The film quality is characterized by electric