Influence of surface stress on the resonance behavior of microcantilevers

✍ Scribed by McFarland, Andrew W.; Poggi, Mark A.; Doyle, Margaret J.; Bottomley, Lawrence A.; Colton, Jonathan S.

• Book ID: 121191496
• Publisher: American Institute of Physics
• Year: 2005
• Tongue: English
• Weight: 398 KB
• Volume: 87
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.2006212