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Influence of substrate temperature on basic electrical properties of CdSe thin films

✍ Scribed by V. Šnejdar; J. Jerhot


Publisher
Elsevier Science
Year
1972
Tongue
English
Weight
392 KB
Volume
11
Category
Article
ISSN
0040-6090

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This paper addresses the effects of substrate temperature on electrical and structural properties of dc magnetron sputter-deposited copper (Cu) thin films on p-type silicon. Copper films of 80 and 500 nm were deposited from Cu target in argon ambient gas pressure of 3.6 mTorr at different substrate