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Influence of substrate temperature and film thickness on the structure of reactively evaporated In2O3 films

✍ Scribed by S. Muranaka; Y. Bando; T. Takada

Publisher: Elsevier Science
Year: 1987
Tongue: English
Weight: 806 KB
Volume: 151
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(87)90134-9

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