✦ LIBER ✦
Influence of substrate heating and thermal annealing on the surface crystallinity in single Si crystals implanted with high doses of 16O
✍ Scribed by T.P. Sjoreen; O.W. Holland; D. Fathy; K. More; R.F. Davis
- Book ID
- 113277026
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 673 KB
- Volume
- 10-11
- Category
- Article
- ISSN
- 0168-583X
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