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Influence of substrate contamination, web handling, and pretreatments on the barrier performance of aluminum oxide atomic layer-deposited BOPP film

✍ Scribed by Lahtinen, Kimmo; Lahti, Johanna; Johansson, Petri; Seppänen, Tarja; Cameron, David C.


Book ID
125376338
Publisher
Springer US
Year
2014
Tongue
English
Weight
621 KB
Volume
11
Category
Article
ISSN
1935-3804

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Aluminum oxide (Al 2 O 3 ) films were produced on n-type (001) Si, SiO 2 and polyimide (PI) substrates by atomic layer deposition method (ALD). The surface morphologies of the coatings were characterized by XRD and AFM, respectively. The adhesive properties of the deposits were investigated as a fun