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Influence of strain on thermal conductivity of silicon nitride thin films

✍ Scribed by Alam, M T; Manoharan, M P; Haque, M A; Muratore, C; Voevodin, A

Book ID: 111678027
Publisher: Institute of Physics
Year: 2012
Tongue: English
Weight: 877 KB
Volume: 22
Category: Article
ISSN: 0960-1317
DOI: 10.1088/0960-1317/22/4/045001

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