✦ LIBER ✦
Influence of some inorganic protective coatings on surface properties of silicon: M A Reveleva et al, Problems of Microelectronics, Collection, Kiev Naukovaya Dumka 1971, 103–110 (in Russian)
- Publisher
- Elsevier Science
- Year
- 1972
- Tongue
- English
- Weight
- 226 KB
- Volume
- 22
- Category
- Article
- ISSN
- 0042-207X
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