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Influence of Si on the target oxide poisoning during reactive arc evaporation of (Al,Cr)2O3 coatings

✍ Scribed by Paulitsch, Jörg; Rachbauer, Richard; Ramm, Jürgen; Polcik, Peter; Mayrhofer, Paul Heinz

Book ID
121425635
Publisher
Elsevier Science
Year
2014
Tongue
English
Weight
941 KB
Volume
100
Category
Article
ISSN
0042-207X

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✍ Jürgen Ramm; Antonia Neels; Beno Widrig; Max Döbeli; Leandro de Abreu Vieira; Al 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 911 KB

The deposition parameters of reactive cathodic arc are correlated with processes at the surface of the composite Al-Cr targets and the nucleation and phase formation of the synthesized Al-Cr-O layers. The oxygen pressure and the pulsed operation of the arc current influence the formation of intermet