✦ LIBER ✦
Influence of reflected primary ions and nonunity sticking coefficients on film stoichiometry during ion-beam-sputter deposition of multicomponent targets
✍ Scribed by D. Theirich; J. Engemann
- Book ID
- 113281557
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 463 KB
- Volume
- 59-60
- Category
- Article
- ISSN
- 0168-583X
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