Influence of reactant gas composition on selected properties of N-doped hydrogenated amorphous carbon films

✍ Scribed by Peter Wood; Ted Wydeven; Osamu Tsuji

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 922 KB
• Volume: 258
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(94)06366-4