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Influence of process parameters on the microstructure of scandium films deposited by electron-beam evaporation

✍ Scribed by Qingying Wu; Wenzeng Bing; Xinggui Long; Xiaosong Zhou; Jinhua Liu; Shunzhong Luo


Book ID
113940960
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
960 KB
Volume
86
Category
Article
ISSN
0042-207X

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Zinc telluride thin films with different thicknesses have been deposited by electron beam gun evaporation system onto glass substrates at room temperature. X-ray and electron diffraction techniques have been employed to determine the crystal structure and the particle size of the deposited films. Th