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Influence of process gas and deposition energy on the atomic and electronic structure of diamond-like (a-C:H) films

✍ Scribed by D. Ugolini; J. Eitle; P. Oelhafen

Publisher: Elsevier Science
Year: 1990
Tongue: English
Weight: 325 KB
Volume: 41
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(90)93961-h

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