✦ LIBER ✦
Influence of post-oxidation cooling rate on residual stress and pn-junction leakage current in LOCOS isolated structures
✍ Scribed by Smeys, P.; Griffin, P.B.; Saraswat, K.C.
- Book ID
- 114536623
- Publisher
- IEEE
- Year
- 1996
- Tongue
- English
- Weight
- 509 KB
- Volume
- 43
- Category
- Article
- ISSN
- 0018-9383
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