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Influence of non-uniformity of laser beam intensity on the surface layer structure of implanted silicon crystals

✍ Scribed by M. Wielunski; J. Auleytner; S. Czarnecki; A. Turos; D. Wielunska


Publisher
John Wiley and Sons
Year
1982
Tongue
English
Weight
431 KB
Volume
17
Category
Article
ISSN
0232-1300

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