How a limited mass transfer in the gas p
✍
Ulf Ackelid; Lars-Gunnar Petersson
📂
Article
📅
1991
🏛
Elsevier Science
🌐
English
⚖ 753 KB
The hydrogen sensitivity of palladium MOS sensors in an oxygen-containing atmosphere is shown to depend on the area of the Pd film, the rate of the gas flow, the total pressure and the type of carrier gas. All observations can be explained by the influence of a limited mass transfer in the gas phase