Influence of laser wavelength on activation of ZrO2 ceramics for electroless metal plating

✍ Scribed by G. A. Shafeev; M. Autric; W. Marine

• Publisher: John Wiley and Sons
• Year: 1997
• Tongue: English
• Weight: 145 KB
• Volume: 7
• Category: Article
• ISSN: 1616-301X
• DOI: 10.1002/(sici)1099-0712(199709)7:5<249::aid-amo315>3.0.co;2-o

✦ Synopsis

Experimental results are presented on modifications of the surface properties of ZrO 2 ceramics exposed in air to radiation of either a KrF laser (l l l l l 248 nm) or an ArF laser (l l l l l 193 nm) with a pulse duration of 15-20 ns. The modifications of their diffuse reflectance spectra (DRS) are studied as a function of the laser beam parameters. The ablated parts of ZrO 2 take on the ability to reduce metals (Cu or Ni) from their respective electroless plating solutions. The electrolessly deposited metal can be patterned via local annealing of the ablated areas with the help of a CW laser, either Ar or CO 2 . The catalytic activity of laser-treated ZrO 2 ceramics towards the electroless deposition of metals is discussed from the viewpoint of the formation of an oxygen-deficient surface under laser ablation. The possibility of ZrO 2 activation for electroless metal deposition using a scanning beam of a lowpower CO 2 laser is demonstrated. *