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Influence of laser microfabrication on silicon electrochemical behavior in HF solution

✍ Scribed by Kestutis Juodkazis; Jurga Juodkazytė; Putinas Kalinauskas; Titas Gertus; Edgaras Jelmakas; Hiroaki Misawa; Saulius Juodkazis

Publisher
Springer
Year
2009
Tongue
English
Weight
317 KB
Volume
14
Category
Article
ISSN
1432-8488

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