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Influence of ion bombardment during deposition on mustructure of evaporated aluminum films

✍ Scribed by V. Dietz; P. Ehrhart; D. Guggi; H.-G. Haubold; W. Jäger; M. Prieler; W. Schilling


Book ID
113281546
Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
424 KB
Volume
59-60
Category
Article
ISSN
0168-583X

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