Influence of initial surface reconstruction on nitridation of Al[sub 2]O[sub 3] (0001) using low pressure ammonia

✍ Scribed by Agnarsson, B.; Göthelid, M.; Olafsson, S.; Gislason, H. P.; Karlsson, U. O.

• Book ID: 120010531
• Publisher: American Institute of Physics
• Year: 2007
• Tongue: English
• Weight: 917 KB
• Volume: 101
• Category: Article
• ISSN: 0021-8979
• DOI: 10.1063/1.2384807