✦ LIBER ✦
Influence of higher deposition temperature on a-Si:H material properties, powder formation and light-induced degradation, using the VHF (70 MHz) glow discharge technique
✍ Scribed by U. Kroll; J. Meier; M. Goetz; A. Howling; J.-L. Dorier; J. Dutta; A. Shah; Ch. Hollenstein
- Book ID
- 115988944
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 305 KB
- Volume
- 164-166
- Category
- Article
- ISSN
- 0022-3093
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