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Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

✍ Scribed by M. Hauptmann; S. Brems; E. Camerotto; A. Zijlstra; G. Doumen; T. Bearda; P.W. Mertens; W. Lauriks

Publisher: Elsevier Science
Year: 2010
Tongue: English
Weight: 293 KB
Volume: 87
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2009.11.061

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Influence of gasification on the performance of a 1&#xa0;MHz nozzle system in megasonic cleaning

Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning