Depth resolution in sputter depth profil
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Seah, M. P.; Spencer, S. J.; Gilmore, I. S.; Johnstone, J. E.
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Article
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2000
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John Wiley and Sons
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English
β 318 KB
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Depth profiles have been made for a new batch of the certified reference material, BCR 261, of ~30 nm and 100 nm of anodic tantalum pentoxide layers on tantalum foil. Atomic force microscopy studies show that the preparation method traditionally used provides an excellent substrate root-mean-square