✦ LIBER ✦
Influence of dynamic sub-pixelation on exposure intensity distribution under diffraction effects in spatial light modulation based lithography
✍ Scribed by Seo, Manseung; Kim, Haeryung
- Book ID
- 125478284
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 978 KB
- Volume
- 98
- Category
- Article
- ISSN
- 0167-9317
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