✦ LIBER ✦
Influence of dummy active patterns on mechanical stress induced by spin-on-glass-filled shallow trench isolation in n-MOSFETs
✍ Scribed by Dongwoo Kim; Seonhaeng Lee; T.K. Oh; S.Y. Cha; S.J. Hong; Bongkoo Kang
- Book ID
- 104052792
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 281 KB
- Volume
- 88
- Category
- Article
- ISSN
- 0167-9317
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