Influence of deposition rate on properties of reactively sputtered TiNx films: J Musil et al,Vacuum,38, 1988, 459–461

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 150 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)90767-7