✦ LIBER ✦
Influence of deposition parameters on the properties of boron-doped amorphous silicon-carbide films: Swati Ray et al,J appl Phys,62, 1987, 3917–3921
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 154 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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