Influence of defects of thin films on determining their thickness by the method based on white light interference : Musilova, J.; Ohlidal, I. Journal of Physics D. Applied Physics, Vol. 25, No. 7, pp. 1131–1138 (14 Jul. 1992)

• Book ID: 108477543
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 149 KB
• Volume: 31
• Category: Article
• ISSN: 0963-8695
• DOI: 10.1016/s0963-8695(98)90490-x