Influence of individual CrβC layer thick
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Xinchun Chen; Zhijian Peng; Zhiqiang Fu; Wen Yue; Xiang Yu; Chengbiao Wang
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Article
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2010
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Elsevier Science
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English
β 632 KB
Multilayered Cr-C/a-C:Cr thin films were prepared by using a hybrid technique of combined vacuum cathodic arc/magnetron sputtering/ion beam deposition. The multilayered films consisted of a dense gradient base layer and 10 bi-layers of Cr-C (chromium matrix containing some carbon) and a-C:Cr (amorph